Electronic Materials Processing Division Topics

Typical Electronic Materials Processing topics include:

  • Fundamental mechanisms in dry etching
  • New developments in lithography
  • Fundamental properties of superlattices
  • Applications of high speed semiconductors
  • Metal/semiconductor interfaces
  • Ferroelectric materials
  • Applications of opto-electronics
  • Silicides and interconnects in VLSI
  • Films: Epitaxial growth
  • Thin insulators for photovoltaic and thin film display applications
  • Semiconductor surfaces quantum well structures
  • Heteroepitaxy
  • Chemical vapor deposition