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Typical Electronic
Materials Processing topics include:
- Fundamental
mechanisms in dry etching
- New developments
in lithography
- Fundamental
properties of superlattices
- Applications
of high speed semiconductors
- Metal/semiconductor
interfaces
- Ferroelectric
materials
- Applications
of opto-electronics
- Silicides
and interconnects in VLSI
- Films:
Epitaxial growth
- Thin insulators
for photovoltaic and thin film display applications
- Semiconductor
surfaces quantum well structures
- Heteroepitaxy
- Chemical
vapor deposition
Divisions
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