Electronic Materials and Processing Division Workshops

Last updated 6 Jan, 2000

2000 2001

The electronic materials and processing division organizes the following workshop in 2000:

  • Workshop 29:

    Workshop on Selective and Functional Film Deposition Technologies as
    Applied to ULSI Technology

    The Workshop on Selective and Functional Deposition Technologies as Applied to ULSI Technology will be held November 20-24, 2000 in Ise-Shima Royal Hotel, Mie, Japan. Scientist and engineers involved in semiconductor research and development are encouraged to attend and to submit papers to the conference. The workshop will have no parallel session and will provide a forum for detailed discussions on the central themes of the workshop.

    Workshop topics will include:

    Selective deposition
    Functional deposition
    Smart film deposition
    Chemical vapor deposition
    Physical vapor deposition
    Solid-phase growth

    The Workshop is sponsored by the IUVSTA which supports small intimate workshops with an expected attendance of 60-80 people in order to provide an environment for extensive interaction between the attendees. There will be no workshop proceedings.

    For more details regarding the workshop, including registration and accommodations, please contact Professor Yukio Yasuda, Chair of the Organizing Committee, Nagoya University, Chikusa-ku, Nagoya, 464-8603, Japan, Tel: +81-52-789-3817, Fax: +81-52-789-3818, E-mail: iuv-workshop@ alice.xtal.nagoya-u.ac.jp, Web: http:// alice.xtal.nagoya-u.ac.jp/iuv-workshop/.

    --organizers Y. Yasuda, G. E. McGuire, J. Murota and S. Zaima

    jointly with IUVSTA Thin Films Division



The Electronic Materials and Processing Division organizes the following workshop in 2001:

VENUE: Aguas de Llndoia, Sao Paulo State, Brazil

DATE: 5th - 10th August, 2001

BACKGROUND Diamond has long been recognized as an excellent candidate for the fabrication of high performance electronic devices. However, conventional single crystal forms of this material are not attractive to the device engineer in terms of their limited physical size and cost. The emergence of thin film forms of diamond, grown by CVD techniques in the late 1980's, promised to solve these problems. However, thin film diamond is a polycrystalline material, which has proved difficult to dope successfully. This position is now changing rapidly, as the control over the growth and the introduction of impurities has dramatically improved. The first commercially useful diamond devices are now becoming available. This workshop will focus on both the scientific aspects of improving this exciting new electronic material and its applications. Other forms of high performance carbons, known collectively as diamond-like carbons (DLCs), have also been developed during this period. Much of the science and the processing issues are common to all these materials, and this workshop aims to bring together diamond and DLC scientists to share and collaborate to benefit of each field.

PRINCIPAL THEMES OF MEETING Synthesis and properties of diamond and diamond-like carbons; characterization and theory; applications including electronic and optoelectronic devices, field emitters, radiation detectors, acoustic wave sensors

SCHEDULE The workshop will spread across five days and consist of keynote speakers who are all experts in diamond or DLC technology, and contributed presentations. No proceedings will be published and speakers will be encouraged to offer thoughts on new and innovative aspects of their research.

60-80, from all IUVSTA communities worldwide

RB Jackman, UK (Chair)
GE McGuire, USA Y Yasuda, Japan

RB Jackman, UK (Chair) GE McGuire, USA